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EUV and X-ray optics : synergy between laboratory and space V : 26-27 April 2017, Prague, Czech Republic / René Hudec, Ladislav Pina, editor ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- EUV and X-Ray Optics: Synergy Between Laboratory and Space (Conference) (5th : 2017 : Prague, Czech Republic)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10235.
- Proceedings of SPIE ; Volume 10235
- Language:
- English
- Subjects (All):
- X-ray optics--Congresses.
- X-ray optics.
- Extreme ultraviolet lithography--Congresses.
- Extreme ultraviolet lithography.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (520 pages).
- Other Title:
- Extreme ultraviolet lithography and X-ray optics
- Place of Publication:
- Bellingham, Washington : SPIE, 2017.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed October 19, 2018).
- ISBN:
- 1-5106-0972-5
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