Metrology, inspection, and process control for microlithography XXXI : 27 February-2 March 2017, San Jose, California, United States

MLA

Sanchez, Martha I., Vladimir A. Ukraintsev and Society of Photo-optical Instrumentation Engineers. Metrology, inspection, and process control for microlithography XXXI : 27 February-2 March 2017, San Jose, California, United States. Bellingham, Washington : SPIE, 2017.

APA

Sanchez, M., Ukraintsev, V. & Society of Photo-optical Instrumentation Engineers. (2017). Metrology, inspection, and process control for microlithography XXXI : 27 February-2 March 2017, San Jose, California, United States. Bellingham, Washington : SPIE.

Chicago

Sanchez, Martha I., Vladimir A. Ukraintsev and Society of Photo-optical Instrumentation Engineers. Metrology, inspection, and process control for microlithography XXXI : 27 February-2 March 2017, San Jose, California, United States. Edited by Martha I. Sanchez and Vladimir A. Ukraintsev. Bellingham, Washington : SPIE, 2017.