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Design-process-technology co-optimization for manufacturability XI : 1-2 March 2017, San Jose, California, United States / Luigi Capodieci, Jason P. Cain, editors ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Design Process Technology Co-Optimization for Manufacturability (Conference) (11th : 2017 : San Jose, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10148.
- Proceedings of SPIE ; Volume 10148
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (198 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2017.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 7, 2018).
- ISBN:
- 1-5106-0748-X
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