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Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors V : 24-25 August 2011, San Diego, California, United States
- Format:
- Book
- Series:
- Proceedings of SPIE Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors V
- Language:
- English
- Subjects (All):
- Nanostructured materials--Congresses.
- Nanostructured materials.
- Microfabrication--Congresses.
- Microfabrication.
- Nanotechnology--Congresses.
- Nanotechnology.
- Place of Publication:
- [Place of publication not identified] SPIE 2011
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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