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Surface and interface analysis of microelectronic materials processing and growth : 1989 microelectronic integrated processing conferences : 10-13 October 1989, Santa Clara, United States / editors, Leonard J. Brillson, Fred H. Pollak ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 1186.
- Proceedings of SPIE ; Volume 1186
- Language:
- English
- Subjects (All):
- Microelectronics--Materials--Congresses.
- Microelectronics.
- Surfaces (Technology)--Analysis--Congresses.
- Surfaces (Technology).
- Physical Description:
- 1 online resource (843 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1989.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed December 10, 2018).
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