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Micromachined devices and components. II : 14-15 October 1996, Austin, Texas / edited by Kevin Chau, Ray M. Roop.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Micromachining--Congresses.
- Micromachining.
- Physical Description:
- 1 online resource (ix, 340 pages) : illustrations
- Place of Publication:
- Bellingham, Wash. : SPIE, 1996.
- Contents:
- Integrated Microdevices and Microsystems (5)
- Chemical Sensors (3)
- Infrared Sensors (3)
- Accelerometers and Gyroscopes (4)
- Modeling (3)
- Actuators (4)
- Flow and Magnetic Sensor (1)
- Pressure and Strain Sensors (4)
- Poster Session (5)
- Plenary Papers (2).
- Notes:
- Description based on publisher supplied metadata and other sources.
- Electronic reproduction, Bellingham, Wash., SPIE--the International Society for Optical Engineering, 2004, Mode of access: World Wide Web, Access restricted to SPIE Digital Library subscribers.
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