Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas

Format:

Book

Contributor:

Motamedi, M. Edward, Contributor.

Bailey, Wayne E., Contributor.

Society of Photo-Optical Instrumentation Engineers, Content Provider.

National Institute of Standards and Technology (U.S.), Content Provider.

Semiconductor Equipment and Materials International, Content Provider.

Series:

Proceedings / SPIE--the International Society of Optical Engineering Microelectronic structures and MEMS for optical processing II

Language:

English

Subjects (All):

Microelectronics--Congresses.

Microelectronics.

Microelectromechanical systems--Congresses.

Microelectromechanical systems.

Optical data processing--Congresses--Equipment and supplies.

Optical data processing.

Optoelectronics--Congresses.

Optoelectronics.

Place of Publication:

[Place of publication not identified] SPIE 1996

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph