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Miniaturized systems with micro-optics and micromechanics. II : 10-12 February 1997, San Jose, California / edited by M. Edward Motamedi, Larry J. Hornbeck, Kristofer S.J. Pister.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Integrated optics--Congresses.
- Integrated optics.
- Miniature electronic equipment--Congresses.
- Miniature electronic equipment.
- Micromechanics--Congresses.
- Micromechanics.
- Optical scanners--Congresses.
- Optical scanners.
- Physical Description:
- 1 online resource (viii, 382 pages) : illustrations
- Place of Publication:
- Bellingham, Wash., USA : SPIE, 1997.
- Contents:
- MOEM Devices (7)
- Beam Steering and Micro-optical Scanners (5)
- Micro-optics Integration I (6)
- Optical Processing and Control (4)
- MOEM Processes (11)
- Micro-optics Integration II (4)
- MEM Actuator Materials (4).
- Notes:
- Description based on publisher supplied metadata and other sources.
- Electronic reproduction, Bellingham, Wash., SPIE--the International Society for Optical Engineering, 2004, Mode of access: World Wide Web, Access restricted to SPIE Digital Library subscribers.
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