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28th European Mask and Lithography Conference : 17-18 January 2012, Dresden, Germany / Uwe F. W. Behringer, Wilhelm Maurer, editors ; organized by VDE/VDI GMM-The Society for Microelectronics, Micro- and Precision Engineering (Germany).
- Format:
- Book
- Conference/Event
- Conference Name:
- European Mask and Lithography Conference (28th : 2012 : Dresden, Germany)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 8352.
- Proceedings of SPIE ; Volume 8352
- Language:
- English
- Subjects (All):
- Integrated circuits--Masks--Congresses.
- Integrated circuits.
- Microlithography--Congresses.
- Microlithography.
- Physical Description:
- 1 online resource (366 pages).
- Other Title:
- Twenty-eighth European Mask and Lithography Conference : 17-18 January 2012, Dresden, Germany
- Place of Publication:
- Bellingham, Washington : SPIE, 2012.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed October 18, 2018).
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