1 option
Micromachining and microfabrication process technology XVII : 24 and 26 January 2012, San Francisco, California, United States
- Format:
- Book
- Series:
- Proceedings of SPIE Micromachining and microfabrication process technology XVII
- Language:
- English
- Subjects (All):
- Micromachining--Design and construction--Congresses.
- Micromachining.
- Microfabrication--Design and construction--Congresses.
- Microfabrication.
- Electromechanical devices--Congresses.
- Electromechanical devices.
- Miniature electronic equipment--Congresses.
- Miniature electronic equipment.
- Place of Publication:
- [Place of publication not identified] SPIE 2012
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.