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Laser-based micro- and nanoprocessing XI : 31 January-2 February 2017, San Francisco, California, United States / Udo Klotzbach, Kunihiko Washio, Rainer Kling, editors ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10092.
- Proceedings of SPIE ; Volume 10092
- Language:
- English
- Subjects (All):
- Lasers--Congresses.
- Lasers.
- Nanotechnology--Congresses.
- Nanotechnology.
- Microtechnology--Congresses.
- Microtechnology.
- Physical Description:
- 1 online resource (277 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2017.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 19, 2018).
- ISBN:
- 1-5106-0626-2
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