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MEMS/MOEMS technologies and applications : 14-18 October 2002, Shanghai, China / editors, Guofan Jin, John S. McKillop, Kazuhiro Hane ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 4928.
- Proceedings of SPIE ; Volume 4928
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Optoelectronic devices--Congresses.
- Optoelectronic devices.
- Physical Description:
- 1 online resource (302 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2002.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 22, 2018).
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