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Smart structures and materials 2003. 3-5 March, 2003, San Diego, California, USA / Smart electronics, MEMS, bioMEMS, and nanotechnology
- Format:
- Book
- Series:
- SPIE proceedings series Smart structures and materials 2003.
- Language:
- English
- Subjects (All):
- Microelectronics--Materials--Congresses.
- Microelectronics.
- Smart materials--Congresses.
- Smart materials.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Actuators--Congresses.
- Actuators.
- Nanotechnology--Congresses.
- Nanotechnology.
- BioMEMS--Congresses.
- BioMEMS.
- Other Title:
- Smart Structures and Materials 2003
- Smart electronics, MEMS, and nanotechnology.
- Place of Publication:
- [Place of publication not identified] SPIE 2003
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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