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Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California
- Format:
- Book
- Series:
- Proceedings / SPIE--the International Society for Optical Engineering Integrated circuit metrology, inspection, and process control IX
- Language:
- English
- Subjects (All):
- Integrated circuits--Congresses--Inspection.
- Integrated circuits.
- Integrated circuits--Congresses--Measurement.
- Process control--Congresses.
- Process control.
- Optical measurements--Congresses.
- Optical measurements.
- Scanning electron microscopes--Congresses.
- Scanning electron microscopes.
- Place of Publication:
- [Place of publication not identified] SPIE 1995
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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