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Micromachined devices and components : 23-24 October, 1995, Austin, Texas / edited by Ray Roop, Kevin Chau.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Micromachining--Congresses.
- Micromachining.
- Physical Description:
- 1 online resource (ix, 296 pages) : illustrations
- Place of Publication:
- Bellingham, Wash. : SPIE, 1995.
- Contents:
- Actuators and Mechanical Devices I (4)
- Actuators and Mechanical Devices II (5)
- Chemical and Biological Sensors (5)
- Flow and Electromagnetic Devices (5)
- Modeling (5)
- Pressure Sensors and Packaging (5)
- Poster Session (2)
- Plenary Papers (2).
- Notes:
- Description based on publisher supplied metadata and other sources.
- Electronic reproduction, Bellingham, Wash., SPIE--the International Society for Optical Engineering, 2004, Mode of access: World Wide Web, Access restricted to SPIE Digital Library subscribers.
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