1 option
Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 23-25 October 1995, Austin, Texas, United States / editors, Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 2641.
- Proceedings of SPIE ; Volume 2641
- Language:
- English
- Subjects (All):
- Microelectronics--Congresses.
- Microelectronics.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Physical Description:
- 1 online resource (154 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1995.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 23, 2018).
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.