Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

Format:

Book

Contributor:

Markus, Karen W., Contributor.

Semiconductor Equipment and Materials International, Content Provider.

National Institute of Standards and Technology (U.S.), Content Provider.

Society of Photo-Optical Instrumentation Engineers, Content Provider.

Series:

Proceedings / SPIE--the International Society of Optical Engineering Micromachining and microfabrication process technology

Language:

English

Subjects (All):

Micromachining--Congresses.

Micromachining.

Microfabrication--Congresses.

Microfabrication.

Electromechanical devices--Congresses--Design and construction.

Electromechanical devices.

Place of Publication:

[Place of publication not identified] SPIE 1995

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph