Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas

Format:

Book

Contributor:

Raaijmakers, Ivo J, Contributor.

Sabnis, Anant G, Contributor.

Semiconductor Equipment and Materials International, Content Provider.

Society of Photo-optical Instrumentation Engineers, Content Provider.

Society of Photo Optical Instrumentation Engineers, Content Provider.

Series:

Proceedings / SPIE--the International Society for Optical Engineering Process, equipment, and materials control in integrated circuit manufacturing

Language:

English

Subjects (All):

Integrated circuits industry--Congresses.

Integrated circuits industry.

Integrated circuits--Design and construction--Congresses.

Integrated circuits.

Manufacturing processes--Congresses.

Manufacturing processes.

Plasma etching--Congresses.

Plasma etching.

Metallizing--Congresses.

Metallizing.

Place of Publication:

[Place of publication not identified] SPIE 1995

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph