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Optical/laser microlithography : 2-4 March 1988, Santa Clara, California, United States / editor, Burn Jeng Lin ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 922.
- Proceedings of SPIE ; Volume 922
- Language:
- English
- Subjects (All):
- Lasers--Industrial applications--Congresses.
- Lasers.
- Microlithography--Congresses.
- Microlithography.
- Physical Description:
- 1 online resource (250 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1988.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed December 1, 2018).
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