2 options
Integrated circuit metrology, inspection, & process control : microlithography conferences : 2-6 March 1987, Santa Clara, CA, United States / editor, Kevin M. Monahan ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 0775.
- Proceedings of SPIE ; Volume 0775
- Language:
- English
- Subjects (All):
- Integrated circuits--Congresses.
- Integrated circuits.
- Process control--Congresses.
- Process control.
- Physical Description:
- 1 online resource (vi, 329 pages).
- Other Title:
- Integrated circuit metrology, inspection, and process control
- Place of Publication:
- Bellingham, Washington : SPIE, 1987.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 13, 2018).
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