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Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 30 March-3 April 1987, the Hague, Netherlands / editor, Manfred Weck ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- International Symposium on Optical and Optoelectronic Applied Sciences and Engineering (4th : 1987 : The Hague, Netherlands)
- International Symposium on Optical and Optoelectronic Applied Sciences and Engineering.
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 803.
- Proceedings of SPIE
- Language:
- English
- Subjects (All):
- Micromachining--Congresses.
- Micromachining.
- Optical instruments--Design and construction--Congresses.
- Optical instruments.
- Physical Description:
- 1 online resource (viii, 159 pages) : illustrations.
- Place of Publication:
- Bellingham, Wash. : SPIE, 1987.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 23, 2018).
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