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International Conference on Micro- and Nano-Electronics 2014 : 6-10 October 2014, Zvenigorod, Russian Federation / Alexander A. Orlikovsky, editor ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 9440.
- Proceedings of SPIE ; Volume 9440
- Language:
- English
- Subjects (All):
- Microelectronics--Congresses.
- Microelectronics.
- Nanoelectronics--Congresses.
- Nanoelectronics.
- Physical Description:
- 1 online resource (440 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2014.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 10, 2018).
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