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Technological advances in micro and submicro photofabrication imagery : acquisition and analysis of pictorial data : 19-20 August 1974, San Diego, United States / editors, William Converse, J. M. Graf ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 0055.
- Proceedings of SPIE ; Volume 0055
- Language:
- English
- Subjects (All):
- Microelectronics--Congresses.
- Microelectronics.
- Electronic circuits--Congresses.
- Electronic circuits.
- Physical Description:
- 1 online resource (136 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1974.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed December 12, 2018).
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