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Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM). XXV : 3-5 February 2020, San Francisco, California, United States / Gediminas Račiukaitis [and three others], editors.

SPIE Digital Library Proceedings Available online

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Format:
Book
Contributor:
Račiukaitis, Gediminas, editor.
Series:
Proceedings of SPIE--the International Society for Optical Engineering ; Volume 11267.
Proceedings of SPIE. 5200- ; Volume 11267
Language:
English
Subjects (All):
Lasers--Industrial applications--Congresses.
Lasers.
Microelectronics--Congresses.
Microelectronics.
Optoelectronics--Congresses.
Optoelectronics.
Physical Description:
1 online resource (166 pages) : illustrations.
Other Title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing
Place of Publication:
Bellingham, Washington : SPIE, 2020.
Notes:
Description based on publisher supplied metadata and other sources.
ISBN:
1-5106-3298-0

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