1 option
Advanced techniques for integrated circuit processing II : Microelectronic Processing '92 : 20-25 September 1992, San Jose, CA, United States / editors, James A. Bondur [and three others] ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Microelectronic Processing '92 Symposium (1992 : San Jose, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 1803.
- Proceedings of SPIE ; Volume 1803
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (x, 404 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1992.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed October 24, 2018).
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