1 option
Advanced techniques for integrated circuit processing : processing integration : 15 September-8 October 1990, Santa Clara, CA, United States / editors, James A. Bondur, Terry R. Turner ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 1392.
- Proceedings of SPIE ; Volume 1392
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (x, 690 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1990.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed October 24, 2018).
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.