1 option
Dimensional optical metrology and inspection for practical applications V : 20 April 2016, Baltimore, Maryland, United States / Kevin G. Harding, Song Zhang, editors ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 9868.
- Proceedings of SPIE ; Volume 9868
- Language:
- English
- Subjects (All):
- Optical measurements--Congresses.
- Optical measurements.
- Physical Description:
- 1 online resource (100 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2016.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed October 19, 2018).
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