1 option
Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia
- Format:
- Book
- Series:
- Proceedings of SPIE Device and process technologies for microelectronics, MEMS, and photonics IV
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Photonics--Congresses.
- Photonics.
- Photomechanical processes--Congresses.
- Photomechanical processes.
- Photolithography--Congresses.
- Photolithography.
- Place of Publication:
- [Place of publication not identified] SPIE 2006
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.