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ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
- Format:
- Book
- Series:
- Proceedings of SPIE ICO20
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Imaging systems--Congresses.
- Imaging systems.
- Optoelectronic devices--Congresses.
- Optoelectronic devices.
- Nanostructured materials--Congresses.
- Nanostructured materials.
- Nanotechnology--Congresses.
- Nanotechnology.
- Other Title:
- ICO20
- Place of Publication:
- [Place of publication not identified] SPIE 2006
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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