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Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia
- Format:
- Book
- Conference/Event
- Author/Creator:
- ICMNE-2005, Corporate Author.
- Conference Name:
- ICMNE-2005 (2005 : Zvenigorod, Russia)
- Series:
- Proceedings of SPIE Micro- and nanoelectronics 2005
- Language:
- English
- Subjects (All):
- Microelectronics--Materials--Congresses.
- Microelectronics.
- Nanotechnology--Congresses.
- Nanotechnology.
- Lithography--Congresses.
- Lithography.
- Photonics--Congresses.
- Photonics.
- Place of Publication:
- [Place of publication not identified] SPIE 2006
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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