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Laser-based micro- and nanoprocessing XII : 30 January-1 February 2018, San Francisco, California, United States / Udo Klotzbach, Kunihiko Washio, Rainer Kling, editors ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Laser-Based Micro- and Nanoprocessing (Conference) (12th : 2018 : San Francisco, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10520.
- Proceedings of SPIE ; Volume 10520
- Language:
- English
- Subjects (All):
- Lasers--Congresses.
- Lasers.
- Microtechnology--Congresses.
- Microtechnology.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (520 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2018.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 16, 2018).
- ISBN:
- 1-5106-1526-1
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