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LAMOM : laser applications in microelectronic and optoelectronic manufacturing XXIII : 29-31 January 2018, San Francisco, California, United States / Beat Neuenschwander [and three others], editors ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Laser Applications in Microelectronic and Optoelectronic Manufacturing (Conference) (23rd : 2018 : San Francisco, Calif.), author.
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 1996-756X. Volume 10519.
- Proceedings of SPIE ; Volume 10519
- Language:
- English
- Subjects (All):
- Lasers--Industrial applications--Congresses.
- Lasers.
- Manufacturing processes--Congresses.
- Manufacturing processes.
- Microelectronics--Congresses.
- Microelectronics.
- Physical Description:
- 1 online resource (230 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2018.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 14, 2018).
- ISBN:
- 1-5106-1524-5
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