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Metallization : performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California
- Format:
- Book
- Series:
- Proceedings / SPIE--the International Society for Optical Engineering Metallization
- Language:
- English
- Subjects (All):
- Integrated circuits--Very large scale integration--Reliability--Congresses.
- Integrated circuits.
- Metallic films--Congresses.
- Metallic films.
- Vapor-plating--Congresses.
- Vapor-plating.
- Integrated circuits--Testing--Congresses--Very large scale integration.
- Metallizing--Congresses.
- Metallizing.
- Other Title:
- Metallization
- Place of Publication:
- [Place of publication not identified] SPIE 1991
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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