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Rapid thermal and integrated processing : microelectronic processing integration : 1-30 September 1991, San Jose, CA, United States / editors, Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 1595.
- Proceedings of SPIE ; Volume 1595
- Language:
- English
- Subjects (All):
- Rapid thermal processing--Congresses.
- Rapid thermal processing.
- Physical Description:
- 1 online resource (133 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1991.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed December 3, 2018).
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