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Spectroscopic characterization techniques for semiconductor technology IV : semiconductor '92 : 22 March 1992, Somerset, NJ, United States / editor, Orest J. Glembocki ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 1678.
- Proceedings of SPIE ; Volume 1678
- Language:
- English
- Subjects (All):
- Semiconductors--Testing--Congresses.
- Semiconductors.
- Spectrum analysis--Congresses.
- Spectrum analysis.
- Physical Description:
- 1 online resource (ix, 308 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1992.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed December 10, 2018).
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