1 option
Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California
- Format:
- Book
- Series:
- Proceedings / SPIE--the International Society for Optical Engineering Vibration control in microelectronics, optics, and metrology
- Language:
- English
- Subjects (All):
- Optical instruments--Vibration--Congresses.
- Optical instruments.
- Vibration--Measurement--Congresses.
- Vibration.
- Place of Publication:
- [Place of publication not identified] SPIE 1992
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.