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Integrated circuit metrology, inspection, and process control VII : SPIE's 1993 Symposium on Microlithography : 28-5 February 1993, San Jose, CA, United States / editor, Michael T. Postek ; sponsored by SPIE.
- Format:
- Book
- Conference/Event
- Conference Name:
- Symposium on Microlithography (1993 : San Jose, Calif.)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 1926.
- Proceedings of SPIE ; Volume 1926
- Language:
- English
- Subjects (All):
- Integrated circuits--Congresses.
- Integrated circuits.
- Process control--Congresses.
- Process control.
- Physical Description:
- 1 online resource (600 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 1993.
- Notes:
- Description based on: online resource; title from title screen (SPIE Digital Library, viewed November 13, 2018).
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