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Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California

SPIE Digital Library Proceedings Available online

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Format:
Book
Contributor:
Kwok, Thomas, Contributor.
Kikkawa, Takamaro, Contributor.
Shenai, Krishna, Contributor.
Society of Photo-Optical Instrumentation Engineers, Content Provider.
Series:
Proceedings / SPIE--the International Society for Optical Engineering Submicrometer metallization
Language:
English
Subjects (All):
Integrated circuits--Design and construction--Congresses.
Integrated circuits.
Metallic films--Congresses.
Metallic films.
Metallizing--Congresses.
Metallizing.
Electrodiffusion--Congresses.
Electrodiffusion.
Semiconductor-metal boundaries--Congresses.
Semiconductor-metal boundaries.
Other Title:
Submicrometer Metallization
Place of Publication:
[Place of publication not identified] SPIE 1993
Language Note:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph

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