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Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California
- Format:
- Book
- Series:
- Proceedings / SPIE--the International Society for Optical Engineering Submicrometer metallization
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction--Congresses.
- Integrated circuits.
- Metallic films--Congresses.
- Metallic films.
- Metallizing--Congresses.
- Metallizing.
- Electrodiffusion--Congresses.
- Electrodiffusion.
- Semiconductor-metal boundaries--Congresses.
- Semiconductor-metal boundaries.
- Other Title:
- Submicrometer Metallization
- Place of Publication:
- [Place of publication not identified] SPIE 1993
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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