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EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany
- Format:
- Book
- Conference/Event
- Author/Creator:
- European Mask and Lithography Conference, Corporate Author.
- Conference Name:
- European Mask and Lithography Conference (24th : 2008 : Dresden, Germany)
- European Mask and Lithography Conference
- Series:
- Proceedings of SPIE EMLC 2008
- Language:
- English
- Subjects (All):
- Integrated circuits--Masks--Congresses.
- Integrated circuits.
- Microlithography--Congresses.
- Microlithography.
- Place of Publication:
- [Place of publication not identified] SPIE 2008
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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