Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany

Format:

Book

Contributor:

Jüptner, Werner P. O., Contributor.

Kujawiânska, Ma±gorzata., Contributor.

Gorecki, Christophe, Contributor.

Kujawińska, Małgorzata, Contributor.

Jèuptner, Werner P. O., Contributor.

Wissenschaftliche Gesellschaft Lasertechnik, Content Provider.

Society of Photo-Optical Instrumentation Engineers, Content Provider.

European Optical Society, Content Provider.

Series:

SPIE proceedings series Microsystems engineering

Language:

English

Subjects (All):

Quality control--Optical methods--Congresses.

Quality control.

Optical detectors--Industrial applications--Congresses.

Optical detectors.

Microelectronics--Congresses.

Microelectronics.

Microelectromechanical systems--Congresses.

Microelectromechanical systems.

Interferometry--Congresses.

Interferometry.

Other Title:

Microsystems Engineering

Place of Publication:

[Place of publication not identified] SPIE 2001

Language Note:

English

Notes:

Bibliographic Level Mode of Issuance: Monograph