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Process and equipment control in microelectronic manufacturing II : 30-31 May 2001, Edinburgh, UK
- Format:
- Book
- Series:
- SPIE proceedings series Process and equipment control in microelectronic manufacturing II
- Language:
- English
- Subjects (All):
- Microelectronics industry--Production control--Congresses.
- Microelectronics industry.
- Integrated circuits--Design and construction--Very large scale integration--Congresses.
- Integrated circuits.
- Microelectronics--Materials--Congresses.
- Microelectronics.
- Place of Publication:
- [Place of publication not identified] SPIE 2001
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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