1 option
Smart sensors, actuators and MEMS VII; and cyber physical systems : 4-6 May 2015, Barcelona, Spain / José L. Sánchez-Rojas, Riccardo Brama, editors ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 9517.
- Proceedings of SPIE ; Volume 9517
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- BioMEMS--Congresses.
- BioMEMS.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (740 pages).
- Other Title:
- Smart sensors, actuators and microelectromechanical systems VII
- Place of Publication:
- Bellingham, Washington : SPIE, 2015.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed December 7, 2018).
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.