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31st European Mask and Lithography Conference : 22-23 June 2015, Eindhoven, Netherlands / Uwe F. W. Behringer, Jo Finders, editors ; organized by VDE/VDI GMM-The Society for Microelectronics, Micro- and Precision Engineering (Germany).
- Format:
- Book
- Conference/Event
- Conference Name:
- European Mask and Lithography Conference (31st : 2015 : Eindhoven, Netherlands)
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 9661.
- Proceedings of SPIE ; Volume 9661
- Language:
- English
- Subjects (All):
- Integrated circuits--Masks--Congresses.
- Integrated circuits.
- Microlithography--Congresses.
- Microlithography.
- Physical Description:
- 1 online resource (252 pages).
- Other Title:
- Thirty-first European Mask and Lithography Conference
- Place of Publication:
- Bellingham, Washington : SPIE, 2015.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed October 18, 2018).
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