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Micro- and nanotechnology : materials, processes, packaging, and systems IV : 10-12 December 2008, Melbourne, Australia
- Format:
- Book
- Series:
- Proceedings of SPIE Micro- and nanotechnology
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Materials--Congresses.
- Microtechnology--Materials--Congresses.
- Nanotechnology--Congresses.
- Electronic packaging--Congresses.
- Other Title:
- Micro- and Nanotechnology
- Place of Publication:
- [Place of publication not identified] SPIE 2008
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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