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Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany / Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 7390.
- Proceedings of SPIE, 0277-786X ; v. 7390
- Language:
- English
- Subjects (All):
- Optical measurements--Congresses.
- Optical measurements.
- Integrated circuits--Congresses.
- Integrated circuits.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Optical measurements--Design and construction--Congresses.
- Semiconductors--Congresses.
- Physical Description:
- 1 online resource (1 v. (various pagings) ) ill. ;
- Place of Publication:
- Bellingham, Wash. : SPIE, 2009.
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- Includes bibliographical references and index.
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