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Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan / Alek C. Chen [and three others], editors ; sponsored by SPIE.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; 0277-786X. Volume 7520.
- Proceedings of SPIE ; Volume 7520
- Language:
- English
- Subjects (All):
- Lithography, Electron beam--Congresses.
- Lithography, Electron beam.
- Microlithography--Industrial applications--Congresses.
- Microlithography.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (520 pages).
- Place of Publication:
- Bellingham, Washington : SPIE, 2009.
- Notes:
- Description based on: online resource; title from pdf title page (SPIE Digital Library, viewed November 17, 2018).
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