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18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany

SPIE Digital Library Proceedings Available online

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Format:
Book
Conference/Event
Author/Creator:
European Conference on Mask Technology for Integrated Circuits and Microcomponents, Corporate Author.
Contributor:
Behringer, Uwe F. W, Contributor.
Society of Photo Optical Instrumentation Engineers, Content Provider.
VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Content Provider.
Conference Name:
European Conference on Mask Technology for Integrated Circuits and Microcomponents (18th : 2002 : Munich, Germany)
European Conference on Mask Technology for Integrated Circuits and Microcomponents
Series:
SPIE proceedings series 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Language:
English
Subjects (All):
Integrated circuits--Masks--Congresses.
Integrated circuits.
Microlithography--Congresses.
Microlithography.
Place of Publication:
[Place of publication not identified] SPIE 2002
Language Note:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph

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