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18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany
- Format:
- Book
- Conference/Event
- Author/Creator:
- European Conference on Mask Technology for Integrated Circuits and Microcomponents, Corporate Author.
- Conference Name:
- European Conference on Mask Technology for Integrated Circuits and Microcomponents (18th : 2002 : Munich, Germany)
- European Conference on Mask Technology for Integrated Circuits and Microcomponents
- Series:
- SPIE proceedings series 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
- Language:
- English
- Subjects (All):
- Integrated circuits--Masks--Congresses.
- Integrated circuits.
- Microlithography--Congresses.
- Microlithography.
- Place of Publication:
- [Place of publication not identified] SPIE 2002
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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