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2009 International Conference on Optical Instruments and Technology : MEMS/NEMS technology and applications : 19-21 October 2009, Shanghai, China
- Format:
- Book
- Conference/Event
- Author/Creator:
- International Conference on Optical Instruments and Technology, Corporate Author.
- Conference Name:
- International Conference on Optical Instruments and Technology
- Series:
- Proceedings of SPIE 2009 International Conference on Optical Instruments and Technology
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Design and construction--Congresses.
- Microelectromechanical systems.
- Nanotechnology--Congresses.
- Nanotechnology.
- Optical instruments--Congresses.
- Optical instruments.
- Other Title:
- MEMS/NEMS technology and applications
- Place of Publication:
- [Place of publication not identified] SPIE 2009
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 0-8194-7896-2
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