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Micromachining and microfabrication : 28-30 November 2000, Singapore
- Format:
- Book
- Series:
- SPIE proceedings series. Micromachining and microfabrication
- Language:
- English
- Subjects (All):
- Micromachining--Congresses.
- Micromachining.
- Microfabrication--Congresses.
- Microfabrication.
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Place of Publication:
- [Place of publication not identified] SPIE 2000
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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