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Smart electronics and MEMS II : 13-15 December 2000, Melbourne, Australia
- Format:
- Book
- Series:
- SPIE proceedings series Smart electronics and MEMS II
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectronics--Congresses.
- Smart materials--Congresses.
- Electromechanical devices--Congresses.
- Place of Publication:
- [Place of publication not identified] SPIE 2001
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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